When measuring multiple beams, the arrangement of the beams, the beam divergence, and the plane of measurement determine whether or not NanoScan can resolve them. In general, each beam in a linear array of collimated beams can be resolved. The measurement must be performed with the scan axes oriented at ±45° to the array. Also, it is useful to use the rotation transformation feature¹ in the NanoScan software to provide the beam positions in coordinates common to the linear array. When beams overlap, it is not possible to completely resolve the profiles. However, it is possible to extract information such as peak separation by manually defining specific ROIs around the beam peaks.