プレミアムエネルギーセンサー (UV含む)
パルスレーザーは、連続発振（CW）レーザーと同様に人気があります。多くのレーザーの物理的特性はパルス動作に適しており、同様に多くのアプリケーションもパルス動作に適しています。パルス幅は非常に短くなっており、フェムト秒に達しています。レーザーエネルギーをこのように短いパルスに集中させ、小さなスポットに照射する場合、μJの範囲の低いパルスエネルギーでも、隣接する領域をゆっくりと加熱し、損傷させることなく材料を溶融、切断、切除、溶接するのに十分です。パルスレーザーは紫外から赤外まで多くの波長で存在しますが、UVレーザーは多くの材料で紫外吸収が高く、短波長での光子エネルギーが高いため、材料加工や医療においてユニークな用途があります。パルスレーザー、特にパルスUVレーザーの利点はすべて、これらのレーザーの設計と測定における課題となっています。例えば、UVパルスレーザー内部の光学部品は、この照射に何千時間もさらされても確実に機能しなければなりません。
In the field of metrology, CW and pulsed lasers are measured with different instruments. CW laser power is measured using a photodiode or a thermopile sensor while pulse energy of repetitively pulsed lasers is measured using a pyroelectric sensor. The heat generated by the absorption of a laser pulse in the pyroelectric crystal produces a transient measurable voltage (proportional to the absorbed energy) across the crystal. When the heat dissipates, the voltage vanishes and the crystal is ready for the next pulse. However, the same properties that make short laser pulses very efficient in affecting change in various materials, pose a challenge for measuring devices - which by definition are required to be stable and provide a trusted measurement. Again, when working with UV lasers, this challenge becomes more pronounced.
Ophir has several types of absorber coatings that are used with pyroelectric crystals; these coatings also protect the crystals from being damaged. When the pulse energy density becomes too high even for these absorbers, diffusers are often used to spread the beam and reduce the energy density on the absorber. Ophir sensors with diffusers have the letters ‘DIF’ or ‘DIFH’ in the model name, for example, ‘PE50-DIF-C’. While the diffusers do a good job in spreading the beam, they also cannot escape the challenges the UV radiation introduces. When exposed to UV, organic contaminants that accumulate on the diffusers are carbonized. This reduces the transmission of the diffusers and changes the reading of the sensor by a few percent. Further exposure to UV light ablates the carbonized contaminants and the transmission recovers to its original value. After a while, more contaminants may accumulate on the diffuser and the process starts over. Exposing the diffuser to UV for several minutes before the actual measurement can ensure a correct measurement, but this isn’t always possible or convenient. Luckily, there is a solution:
Ophir offers two types of diffusers for its energy sensors: ‘DIF’ – Sensors with this "standard" diffuser are calibrated for wavelengths ranging from 355 to 2100 nm. ‘DIFH’ – Ophir offers two sensors with a special type of diffuser that has both a higher damage threshold and a special surface microstructure that prevents the accumulation of contamination. The PE50U-DIFH-C and PE50BF-DIFH-C are Ophir’s premium energy sensors. They are calibrated at wavelengths starting from 193 nm all the way to 2940 nm, and have a particularly high damage threshold even at these UV wavelengths (1 J/cm2 at 193 nm). These 2 sensors are the best solution for pulsed lasers at 193nm and 248nm.