New Ophir® Laser Power Sensor Measures High Repetition Rate, Short Pulse Industrial Lasers for Micromachining up to 120W

Andover, MA – September 14, 2021 – MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has announced the Ophir® F80(120)A-CM-17, a state-of-the-art thermal sensor for measuring high repetition rate lasers with very short pulses in the nano, pico, and femto second ranges. High repetition rate lasers induce damage to conventional sensor coatings at lower power densities than required by users. The F80(120)A-CM-17 is a compact, calibrated, fan cooled sensor designed to solve that problem. It can withstand higher power densities and measure average power up to 80W and intermittent power up to 120W. This makes the new sensor ideal for use in micromachining and material micro-processing applications in the semiconductor, display, and medical industries.

The Ophir F80(120)A-CM-17 laser power sensor works with industrial lasers at wavelengths from 248nm – 9.4µm. It measures laser power from 100mW to 80W continuous (to 120W intermittent). The sensor is fan-cooled with a 17.5mm aperture. It features a unique absorber that will not suffer from the ablation usually caused by very short pulses and can withstand high power densities up to 7 kW/cm2 at 80W.

“Micromachining demands precise delivery of near-perfect laser beam quality, which depends on lasers with shorter wavelengths, shorter pulses, and high repetition rates with high average power and increased pulse energy,” said Reuven Silverman, General Manager, Ophir Photonics. “To rapidly fabricate precisely controlled features requires 24x7 power monitoring, especially for high repetition pulsed lasers with nanosecond pulses. The F80(120)A-CM-17 sensor meets this challenge by providing high accuracy measurements in such circumstances and is able to withstand higher power densities for high repetition rate pulsed lasers than sensors with conventional coatings.”

The Ophir F80(120)A-CM-17 sensor, like all Ophir sensors, features a “Smart Connector” interface that operates with the company’s Centauri, StarBright, Vega, Nova II, and StarLite smart displays, Juno and Juno+ compact USB PC interface and EA-1 Ethernet adapter. Users can choose between a variety of data display formats, including Digital with Bargraph, Line Plot, Pulse Chart, and Real Time Statistics. The displays also feature sophisticated logging of power and energy, statistics, histograms, and more, as well as advanced math functions. The display is automatically configured and calibrated when plugged into one of the company’s laser measurement heads.

Availability & Pricing

The Ophir F80(120)A-CM-17 laser sensor is available now. OEM prices available on request.

About MKS Instruments

MKS Instruments, Inc. (NASDAQ: MKSI), is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, vacuum technology, lasers, photonics, optics, precision motion control, vibration control and laser-based manufacturing systems solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, research and defense. Additional information can be found at

About the Ophir Brand

Ophir is a brand within the MKS Instruments Light & Motion division. The Ophir product portfolio consists of laser and LED measurement products, including laser power and energy meters, laser beam profilers measuring femto-watt to hundred-kilowatt lasers, high-performance IR and visible optical elements, IR thermal imaging lenses and zoom lenses for defense and commercial applications, OEM and replacement high-quality optics and sub-assemblies for CO2 and high-power fiber laser material processing applications. Ophir products enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, research and defense markets. For more information, visit

For more information
Reuven Silverman, General Manager Ophir Business Unit (U.S.)
3050 North 300 West, North Logan, UT 84341
Tel: +1 435-753-3729

Shari Worthington, PR Telesian Technology
49 Midgley Lane, Worcester, MA 01604
Tel: +1 508-397-6345

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